@article{carvalho_carvalho_silva_demarquette_2006, title={Hydrophobic plasma polymerized hexamethyldisilazane thin films: characterization and uses}, volume={9}, ISSN={1516-1439}, url={https://doi.org/10.1590/S1516-14392006000100003}, DOI={10.1590/S1516-14392006000100003}, number={1}, journal={Materials Research}, publisher={ABM, ABC, ABPol}, author={Carvalho, Alexsander Tressino de and Carvalho, Rodrigo Amorim Motta and Silva, Maria Lúcia Pereira da and Demarquette, Nicole Raymond}, year={2006}, month={Jan}, pages={9–13} }