This work is devoted to the study of the electrical characteristics of microhollow cathode discharges (MHCD) at moderate to high pressure in argon and air for different geometries. High-pressure glow discharges can be operated in MHCD devices with µm electrode spacing. Experiments have been performed to determine the so-called Paschen curves, i.e. the dependence of the breakdown voltage on the product electrode gap and gas pressure. Current-voltage characteristic curves were obtained as a function of the pressure and hole diameter. MHCD enables stable direct current discharges that could be ignited for pressures ranging from 12 to 800 Torr, in a very wide range of current densities and electrodes materials. Evidence of electron field emission was observed for several ranges of gap spacing.
Microhollow cathode discharge; high-pressure glow discharge; electron field emission
