A simple device for glass plate drilling, which is an important step in microfabrication procedures, is described. A reservoir of concentrated hydrofluoric acid with a hole in its bottom is affixed against the glass plate. Leakage is prevented by using a neoprene O-ring. A plastic pipet tip inserted in the reservoir, close to the corrosion region, provides forced convection by pressure variations inside it. A device to make 5 simultaneous holes in a plate is also presented. For a 140 µm thickness alkaline glass lamina and 1/8" O-ring, 5 holes are drilled in 20 min.
microfabrication; micro total analysis system; drilling; glass plate
