Flexible capacitive pressure sensors with porous double microstructured layers

Wang, Jun; Sun, Hanxuan; Chen, Shenghua; Xu, Ce; Wang, Zhihua

doi:10.1590/1517-7076-RMAT-2023-0344

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Articles • Matéria (Rio J.) 29 (3) • 2024 • https://doi.org/10.1590/1517-7076-RMAT-2023-0344 copy

Flexible capacitive pressure sensors with porous double microstructured layers

Authorship SCIMAGO INSTITUTIONS RANKINGS

ABSTRACT

In this study, a flexible capacitive pressure sensor was developed, featuring a dielectric layer composed of a polydimethylsilane (PDMS)/BaTiO₃/SrTiO₃ composite material. The electrode and dielectric layers were structured with a dual microstructure, combining diagonal and sandpaper-porous elements. Additionally, nano-barium titanate (BT) powder, known for its relatively high dielectric constant, was incorporated into PDMS, along with an appropriate amount of strontium titanate (STO), to enhance the sensor’s sensitivity. The developed sensor exhibited a remarkable sensitivity of 2.681 kPa^–1, with response and release times of approximately 39 ms and 61 ms, respectively. It demonstrated a low detection threshold and withstood over 5000 compression cycles, showcasing excellent repeatability. The results underscored the sensor’s robust pressure-sensing performance, making it suitable for diverse applications, including human pulse monitoring, heartbeat tracking, robot arm sensing, object weight detection, and real-time healthcare monitoring.

Keywords:
Flexible Capacitive Sensor; Double Microstructure Layer; Nano-Barium Titanate; Multi-Walled Carbon Nanotubes; Pressure Sensor

PROPERTY/CONCENTRATION	1WT%CNTS	2 WT%CNTS	3 WT%CNTS
Tensile property	1.7MPA	1.8MPA	1.85MPA
Fracture load	1000%	920%	860%
Electrical conductivity	0.13S/CM	0.42S/CM	0.62S/CM

ELECTRODE	DIELECTRIC LAYER	MEASURING RANGE(KPA)	MAXIMUM SENSITIVITY (KPA^–1)	RESPONSE TIME (MS)	REFERENCE
CNTs	CNTs	0–3.5	2.13	<100	[³³[33] LIU, F., DAI, S., CAO, J., et al., “CNTs based capacitive stretchable pressure sensor with stable performance”, Sensors and Actuators. A, Physical, v. 343, pp. 113672, 2022. doi: http://doi.org/10.1016/j.sna.2022.113672. https://doi.org/10.1016/j.sna.2022.11367... ]
activated carbon non-woven fabrics	graphene/PS microsphere/PDMS	0–150	0.209	<25	[³⁴[34] WU, X., ZHAO, W., DUAN, J., et al., “Flexible pressure sensor based on graphene/PS microsphere/PDMS composite dielectric layer and activated carbon non-woven fabrics”, Materials Letters, v. 326, pp. 132952, 2022. doi: http://doi.org/10.1016/j.matlet.2022.132952. https://doi.org/10.1016/j.matlet.2022.13... ]
CuNWs/PDMS	porous PDMS	0–6	0.162	<240	[²⁷[27] YU, S., LI, J., ZHAO, L., et al., “Stretch-insensitive capacitive pressure sensor based on highly stretchable CuNWs electrode”, Sensors and Actuators. A, Physical, v. 346, pp. 113868, 2022. doi: http://doi.org/10.1016/j.sna.2022.113868. https://doi.org/10.1016/j.sna.2022.11386... ]
Al fabric	porous PDMS composites	0–400	0.18	<100	[³⁵[35] HWANG, J., KIM, Y., YANG, H., et al., “Fabrication of hierarchically porous structured PDMS composites and their application as a flexible capacitive pressure sensor”, Composites. Part B, Engineering, v. 211, pp. 108607, 2021. doi: http://doi.org/10.1016/j.compositesb.2021.108607. https://doi.org/10.1016/j.compositesb.20... ]
copper tape	CNT/BT@DCPU	0–100	2.51	<100	[³⁶[36] MA, Z., ZHANG, K., YANG, S., et al., “High-performance capacitive pressure sensors Fabricated by introducing dielectric filler and conductive filler into a porous dielectric layer through a Biomimic strategy”, Composites Science and Technology, v. 227, pp. 109595, 2022. doi: http://doi.org/10.1016/j.compscitech.2022.109595. https://doi.org/10.1016/j.compscitech.20... ]
CNTs/silicon rubber	PDMS/BT/STO	0–50	2.681	35	本文

Laboratório de Hidrogênio, Coppe - Universidade Federal do Rio de Janeiro, em cooperação com a Associação Brasileira do Hidrogênio, ABH2 Av. Moniz Aragão, 207, 21941-594, Rio de Janeiro, RJ, Brasil, Tel: +55 (21) 3938-8791 - Rio de Janeiro - RJ - Brazil
E-mail: revmateria@gmail.com

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[1] Corresponding Author: Zhihua Wang. e-mail: 1312349729@qq.com, 15122695177@163.com, chenshenghua@hebut.edu.cn, xuce2001@163.com, wangzhihua@hebut.edu.cn